EXECUTION COPY
EXHIBIT 10.13*
EQUIPMENT PASSDOWN AGREEMENT
This Equipment Passdown Agreement (this "Agreement") is made this July 31, 1999
(the "Effective Date") between Semiconductor Components Industries, LLC, a
Delaware limited liability company ("SCILLC") and Motorola, Inc., a Delaware
corporation ("Motorola").
WITNESSETH:
WHEREAS, pursuant to the Reorganization Agreement and the Recapitalization
Agreement, as defined herein, the business and operations of the Semiconductor
Components Group are being reorganized as a "stand alone" business;
WHEREAS, in connection therewith, Motorola and SCILLC desire that Motorola sell,
and SCILLC purchase, certain equipment no longer used in active service as set
forth herein;
NOW, THEREFORE, in consideration of the premises and covenants set forth herein
and other good and valuable consideration, the receipt and sufficiency of which
is hereby acknowledged, Motorola and SCILLC agree as follows:
1 DEFINITIONS:
1.1 CLOSING DATE means July 31, 1999.
1.2 EQUIPMENT shall include all semiconductor fab, assembly, packaging
and testing equipment owned by Motorola and used in the business of
SPS usable in SCG's business that Motorola is proposing to remove
from active service or put up for sale, provided that such
definition does not include equipment Motorola is selling or
otherwise transferring to a majority controlled affiliate or is
selling or transferring to a third-party in a transaction that will
generate sales for Motorola.
1.3 GAP shall have the meaning ascribed to such term in Section 2.6,
hereof.
1.4 MOTOROLA LIST shall have the meaning ascribed to such term in
subsection 2.1.1, hereof.
1.5 RECAPITALIZATION AGREEMENT means the Agreement and Plan of
Recapitalization and Merger, as amended pursuant to Amendment No. 1
to the Recapitalization Agreement dated July 28, 1999, by and among
Motorola, Inc., SCG Holding Corporation, Semiconductor Components
Industries, LLC, TPG Semiconductor Holdings LLC and TPG
Semiconductor Acquisition Corp made as of May 11, 1999
1.6 REORGANIZATION AGREEMENT means the Reorganization Agreement by and
among Motorola, Inc., SCG Holding Corporation and Semiconductor
Components Industries, LLC dated as of May 11, 1999.
1.7 SCG LIST shall have the meaning ascribed to such term in subsection
2.1.2, hereof.
----------------
* Confidential information in this Exhibit 10.13 has been ommitted
and filed separately with the Securities and Exchange Commission.
1.8 SPS means the Semiconductor Product Sector of Motorola.
2 RIGHT OF PURCHASE
2.1 SCILLC will have the right throughout the term of this Agreement to
purchase any Equipment pursuant to the following conditions:
2.1.1 Motorola shall provide to SCILLC, on a monthly basis, a list
setting forth any Equipment Motorola is planning to remove
from active services (the "Motorola List"). Motorola shall
provide such Motorola Lists on an exclusive basis to SCILLC
fifteen (15) days prior to any disclosure of such lists to any
brokers or other third-parties. In addition, representatives
of SCILLC and Motorola shall also meet at least once a year to
discuss Motorola's plans with regard to the disposition of any
Equipment and SCILLC's Equipment needs. In the event the
parties mutually agree, SCILLC shall have the same right of
first refusal with regard to any Equipment identified pursuant
to such negotiations as it does with regard to Equipment
provided on a Motorola List.
2.1.2 Within fifteen (15) days of SCILLC's receipt of the Motorola
List, SCILLC shall provide Motorola with an initial list (the
"SCG List") of any Equipment it wishes to purchase, including
an offered price. The offered price is contingent upon
SCILLC's satisfactory inspection of the Equipment pursuant to
subsection 2.1.3.
2.1.3 SCILLC shall have fifteen (15) days from the time it is
provided the Motorola List to inspect the Equipment on the SCG
List. Motorola shall provide SCILLC access during reasonable
business hours to inspect such Equipment. Such inspection
shall include, if possible, an opportunity to observe the
Equipment in use prior to its decommissioning.
2.1.4 During the 15 day period described in subsection 2.1.3, SCG
and Motorola may also further negotiate the price for any of
the Equipment. Before the end of this 15 day period, SCG shall
provide a final offer with regard to the Equipment (the "Final
Offer").
2.1.5 In the event Motorola does not accept SCILLC's Final Offer
with regard to any individual piece of Equipment within
ten (10) days of receipt of the Final Offer, such Final Offer
shall be considered withdrawn and Motorola shall have the
right to offer such Equipment for sale to any other parties
or donate such Equipment to an educational institution;
*********************************************************
********************************
------------------
* Confidential Information omitted and filed separately with the Securities
and Exchange Commission.
2
*************************************************************
********** months after Motorola rejects SCILLC's Final
Offer without first offering such Equipment to SCG for sale
at a price equal to SCG's Final Offer. Upon request,
Motorola will provide reasonable documentation to evidence
such sale or donation.
2.2 To the extent Motorola has decided to terminate any operating lease
for Equipment, Motorola shall notify SCILLC, and SCILLC shall have
fifteen (15) days in which to notify Motorola of its desire to
assume the lease. If SCILLC notifies Motorola of its desire to
assume the lease, Motorola shall reasonably cooperate with SCILLC
for a period not to exceed 30 days, to negotiate mutually
satisfactory terms for SCILLC's assumption of the lease. If the
parties cannot reach agreement within such 30-day period, Motorola
shall have no further obligation to SCILLC under this subsection
2.2. Motorola shall assist SCILLC in obtaining any necessary third
party consents to such an assignment, provided that any fees or
costs relating to such assistance shall not exceed the costs
Motorola would have incurred for the termination of such lease, and
provided that if such costs to Motorola exceed the costs Motorola
would have incurred to terminate the lease, then such additional
costs shall be paid by SCILLC.
2.3 SCILLC's right to purchase or lease Equipment shall not apply to a
sale by Motorola of a complete facility or product line as an
operating entity.
2.4 In addition to any Equipment sold pursuant to this Agreement,
Motorola shall also use reasonable efforts to provide any related
operation and maintenance manuals and schematics and, in the event
such Equipment is the last piece of such Equipment owned by
Motorola, any related spare parts and consumables related solely to
such Equipment.
2.5 If SCILLC elects to sell any Equipment previously purchased from
Motorola pursuant to this Agreement within a one (1) year of the
purchase date, then SCILLC shall pay Motorola the difference between
the net proceeds from such sale (if such sale price is higher than
the price paid by SCILLC) and the price paid to Motorola.
2.6 As of July 30, 1999, the parties acknowledge there is a currently
estimated shortfall of $12.8 million net book value of equipment to
be transferred to SCILLC (the "GAP"). Motorola agrees to cooperate
with SCILLC to identify Equipment, acceptable to SCILLC, that would
otherwise be covered by this Section 2 and transfer such Equipment
to SCILLC at no cost. Upon such transfer, the Gap will be reduced by
the net book value of such equipment, or if such transferred
equipment is listed on Schedule A, by the amount listed alongside
such product under the category titled "Cost to Procure Now." If,
two (2) years from the Closing Date, the Gap is greater than zero,
then Motorola will pay SCILLC cash equal to two times the remaining
balance of the Gap.
------------------
* Confidential Information omitted and filed separately with the Securities
and Exchange Commission.
3
3 EQUIPMENT
3.1 The sale of any Equipment, or assignment of a lease hereunder, does
not imply any transfer of Motorola's intellectual property,
technical information or know-how.
4 DELIVERY AND PAYMENT
4.1 The Equipment will be sold FOB the loading dock at the location
where the Equipment was last used. Motorola shall be responsible for
all expenses associated with the removal of the Equipment from
active use (including disconnect, purge, shrinkwrapping and other
activities normally conducted by Motorola prior to packing, crating,
stabilization and caging). SCILLC shall be responsible for all
packing, crating, stabilization, caging and shipping costs and
compliance with any local laws, including export control laws.
Shipment must be completed within fifteen (15) days of the
completion of all packing, crating, stabilization and caging, or
Motorola may assess reasonable storage charges.
4.2 Payment shall be due to Motorola 30 days after the date of invoice.
5 INSPECTION/WARRANTIES
5.1 If Motorola does not afford SCILLC adequate opportunity to observe
the de-installation of the Equipment, Motorola shall warrant that
the Equipment has been de-installed and, if relevant, stored, in a
manner that is consistent with Motorola's usual and customary
practices and, has been turned over to the SCILLC designated carrier
in the same condition (other than normal changes related to the
de-installation process) as it was immediately prior to
de-installation. Motorola shall provide SCILLC with any related
documentation to that effect generated in the ordinary course of
business. OTHER THAN THE LIMITED WARRANTY SET FORTH HEREIN, THE
EQUIPMENT SHALL BE SOLD "AS-IS."
6 TERM
6.1 This Agreement shall remain in effect through the end of December
31, 2003, and shall be renewable on an annual basis by mutual
consent thereafter.
7 OTHER SUPPORT
7.1 Motorola shall consider reasonable requests by SCILLC for
installation support in connection with the equipment purchased
hereunder. In such an event, Motorola and SCILLC shall seek to reach
agreement as to the scope, terms and costs of any such installation
support, provided that Motorola shall have no liability for such
support unless specifically agreed to by the parties at such time.
4
7.2 Motorola shall reasonably assist SCILLC in obtaining the benefit of
any existing third-party parts supply, support or other contracts
relating to the Equipment, provided that SCILLC shall be responsible
for all expenses related thereto.
8 ASSIGNMENT
8.1 This Agreement shall be binding upon, inure to the benefit of, and
be enforceable by or against the parties hereto and their respective
successors and assigns; provided, however, that neither party hereto
may assign this Agreement without the prior written consent of the
other (which consent shall not unreasonably be withheld) except to a
party that acquires all or substantially all of the assets of the
assigning party (provided, further that for the purposes of this
assignment by SCILLC, or any assignment by operation of law, TPG
Partners II or any affiliated funds must directly or indirectly
remain the single largest shareholder of such an acquirer of the
surviving entity) or for the account of the lenders providing bank
financing solely and specifically for the purpose of securing such
bank financing in connection with the Recapitalization Agreement and
the transactions contemplated thereby. In the event Motorola sells
substantially all of the assets of SPS, such acquirer shall remain
bound by the terms of this Agreement.
9 NOTIFICATION
9.1 Unless otherwise indicated herein, all notices, requests, demands or
other communications to the respective parties hereto shall be
deemed to have been given or made when deposited in the mails,
registered mail, return receipt requested, postage prepaid, or by
facsimile to the respective party at the following address:
If to Motorola for Motorola, Inc.
Technical 0000 Xxxxxxx Xxxxxx Xxxxx Xxxx
Matters: Xxxxxx, Xxxxx 00000
Facsimile Number: (000) 000-0000
Attn: Xxx Xxxx
If to Motorola: Motorola, Inc.
Law Department
0000 X. Xxxxxxxxx Xxxx
Xxxxxxxxxx, Xxxxxxxx 00000
Facsimile Number: (000) 000-0000
Attn: General Counsel
and to Winston & Xxxxxx
00 Xxxx Xxxxxx Xxxxx
0
Xxxxxxx, Xxxxxxxx 00000
Facsimile Number:(000) 000-0000
Attn: Xxxxx X. Xxxxx, Esq.
If to SCILLC: SCG Holding Corporation
0000 X. XxXxxxxx Xxxx
Xxxxxxx, Xxxxxxx 00000
Facsimile Number: (000) 000-0000
Attn: Xxxxx Xxxxxxxx
With copies to: Xxxxx Xxxxxxx
Texas Pacific Group
000 Xxxxxxxxxx Xxxxxx
Xxxxx 0000
Xxx Xxxxxxxxx, Xxxxxxxxxx 00000
Facsimile Number: (000) 000-0000
and
Cleary, Gottlieb, Xxxxx & Xxxxxxxx
Xxx Xxxxxxx Xxxxx
Xxx Xxxx, Xxx Xxxx 00000
Attention: Xxxx X. Xxxx, Esq.
Facsimile Number: (000) 000-0000
10 TRANSLATION
10.1 If this Agreement is translated into a language other than English,
the English language version will be the only version binding upon
the parties.
11 ENTIRE AGREEMENT
11.1 This Agreement, the Reorganization Agreement and the
Recapitalization Agreement contain the entire agreement and
understanding between the parties hereto with respect to the subject
matter hereof and supersede all prior agreements and understandings,
whether written or oral, relating to such subject matter.
12 MODIFICATION, NONWAIVER, SEVERABILITY
12.1 No alleged waiver, modification or amendment to this Agreement or to
Schedule A attached hereto shall be effective against either party
hereto, unless in writing, signed by the party against which such
waiver, modification or amendment is asserted, and referring
specifically to the provision hereof alleged to be waived, modified
or amended. The failure or delay of either party to insist upon the
other party's strict performance of the provisions in this Agreement
or to exercise in any respect any right, power, privilege, or remedy
provided for under this Agreement shall not operate as a waiver or
relinquishment thereof, nor shall any
6
single or partial exercise of any right, power, privilege, or remedy
preclude other or further exercise thereof, or the exercise of any
other right, power, privilege, or remedy; provided, however, that
the obligations and duties of either party with respect to the
performance of any term or condition in this Agreement shall
continue in full force and effect.
13 APPLICABLE LAW AND DISPUTE RESOLUTION
13.1 New York law governs this Agreement. The parties will settle any
claim or controversy arising out of this Agreement in the manner set
forth in Article IV.3 the Reorganization Agreement.
14 COMPLIANCE WITH LAWS
14.1 Both parties will comply with all applicable state, federal or local
laws, regulations or ordinances in the performance of their
respective duties and obligations under this Agreement.
15 EXPORT CONTROL AND GOVERNMENTAL APPROVAL
15.1 The parties acknowledge that each must comply with all applicable
rules and laws in the performance of their respective duties and
obligations including, but not limited to, those relating to
restrictions on export and to approval of agreements. Each party
will be responsible for obtaining and maintaining all approvals and
licenses, including export licenses, permits and governmental
authorizations from the appropriate governmental authorities as may
be required to enable such party to fulfill its obligations under
this Agreement. Each party agrees to use its best efforts to the
other in obtaining any such approvals, export licenses, permits or
governmental authorizations.
15.2 Each party agrees that, unless prior written authorization is
obtained from the United States Bureau of Export Administration, it
will not export, re-export, or transship, directly or indirectly,
any products or technical information that would be in contravention
of the Export Administration Regulations then in effect as published
by the United States Department of Commerce.
16 SECTION TITLES
16.1 Section titles as to the subject matter of particular sections
herein are for convenience only and are in no way to be construed as
part of this Agreement or as a limitation of the scope of the
particular sections to which they refer.
17 INTERPRETATION
17.1 The headings and captions contained in this Agreement and in the
Schedule attached hereto are for reference purposes only and shall
not affect in any way the meaning or interpretation of this
Agreement. The use of the word "including"
7
herein shall mean "including without limitation." Capitalized terms
not defined herein shall have the terms set forth in the
Recapitalization Agreement.
18 NO STRICT CONSTRUCTION
18.1 The language used in this Agreement shall be deemed to be the
language chosen by the parties hereto to express their mutual
intent, and no rule of strict construction shall be applied against
any person.
19 COUNTERPARTS
19.1 This Agreement may be executed in several counterparts, each of
which shall be deemed to be an original, but all of which shall
constitute one and the same instrument.
8
IN WITNESS WHEREOF, the parties have caused this Agreement to be executed by
their duly authorized representatives as of the date and year first set forth
above.
MOTOROLA, INC.
By: /s/ Xxxx X. Xxxxxxxxx
----------------------------------------
Name: Xxxx X. Xxxxxxxxx
----------------------------------------
Title: Executive Vice-President and
Chief Financial Officer
----------------------------------------
SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
By: SCG Holding Corporation, its sole
member
By: /s/ Xxxxxxxx X. Xxxxxxxxx
----------------------------------------
Name: Xxxxxxxx X. Xxxxxxxxx
----------------------------------------
Title: Vice-President
----------------------------------------
Equipment Passdown Agreement
CAPX GAP 1999-2000 UPDATED: 4/20/99
SCHEDULE A
COST TO
PROCURE TOOL
NOW
SCG PROJECT REQUIREMENT ASSET DESCRIPTION
------------------------------------------------------------ ------------------------------------------------- ---------------------
Aizu MOS7X - 2000 wpw Ph I FVI (microscope) $10,000
Aizu MOS7X - 2000 wpw Ph I FVI (microscope) $10,000
Required for Tesla (Std. Lin.) 11 K wpw Microscope $10,000
Required for Tesla (Std. Un.) 11 K wpw Nanometrics $10,000
Required for Piestany (M. Gate) 4K wpw MEGASONIC CLEANING SYSTEM $30,000
Required for Tesla (Std. Lin.) 11 K wpw REFURBD VERTEQ MEGASONIC CL $30,000
Required for Tesla (Std. Lin.) 11 K wpw VERTEQ MEGASONIC CLEAN SYST $30,000
Required for Tesla (Std. Lin.) 11 K wpw VERTEQMEGASONIC CLEANING SY $30,000
Aizu MOS7X - 2000 wpw Ph I Prober for inking $40,000
Aizu MOS7X - 2000 wpw Ph I Prober for inking $40,000
Aizu MOS7X - 2000 wpw Ph I Parametric prober $40,000
Aizu MOS7X - 2000 wpw Ph I Prober for FET Tester $40,000
Aizu MOS7X - 2000 wpw Ph I Prober for FET Tester $40,000
Required for Piestany (M. Gate) 4K wpw 2001 X/2 AUTO PROBER $40,000
Required for Piestany (M. Gate) 4K wpw 2001X/20 AUTOPROBER $40,000
Required for Piestany (M. Gate) 4K wpw THERMAL PROCESS SYSTEM (RTA) $40,000
Required for Piestany (M. Gate) 4K wpw Motorola T.5 Tester $60,000
Required for Piestany (M. Gate) 4K wpw Motorola T.5 Tester $60,000
Required for Piestany (M. Gate) 4K wpw Motorola T.5 Tester $60,000
Required for Piestany (M. Gate) 4K wpw Motorola T.5 Tester $60,000
Required for Plestany (M. Gate) 4K wpw Fuming Nitric Metal Redo Bench (Bath) $70,000
Required for Tesla (Std. Lin.) 11 K wpw MOD SPW-612A SPIN ETCHER-SIN $75,000
Required for Tesla (Std. Un.) 11 K wpw MOD SPW-612A SPIN ETCHER-SIN $75,000
Required for Tesla (Std. Lin.) 11 K wpw MOD SPW-612A SPIN ETCHER-SIN $75,000
Aizu MOS7X - 2000 wpw Ph I Post Clean $100,000
Aizu MOS7X - 2000 wpw Ph I Resist Removal $100,000
Required for CDMC 1500 wpw Fusion DUV $100,000
Required for Piestany (M. Gate) 4K wpw Nanostrip Bench (bath) $100,000
Required for Piestany (M. Gate) 4K wpw Nanostrip Bench (bath) $100,000
Required for Piestany (M. Gate) 4K wpw Questor & CD Measurement Systems $100,000
Required for Piestany (M. Gate) 4K wpw Quaster Plus Measurement System $100,000
Required for Piestany (M. Gate) 4K wpw PreMetal Clean Bench (Bath) $140,000
Aizu MOS7X - 2000 wpw Ph I FET Tester for IGBT $150,000
Aizu MOS7X - 2000 wpw Ph I FET Tester for IGBT $150,000
Required for Piestany (M. Gate) 4K wpw Negative Coater Track $175,000
Required for Piestany (M. Gate) 4K wpw Negative Coater Track $175,000
Required for Piestany (M. Gate) 4K wpw Negative Coater Track $175,000
Required for Piestany (M. Gate) 4K wpw Negative Coater Track $175,000
Required for Piestany (M. Gate) 4K wpw Negative Developer Track $175,000
Required for Piestany (M. Gate) 4K wpw Negative Developer Track $175,000
Aizu MOS7X - 2000 wpw Ph I H3PO4 Hood Wet Nitride Etch $190,000
Required for Piestany (M. Gate) 4K wpw HF Wet Bench (bath) $190,000
Required for Piestany (M. Gate) 4K wpw HF Wet Bench (bath) $190,000
CAPX GAP 1999-2000 UPDATED: 4/20/99
COST TO
PROCURE TOOL
NOW
SCG PROJECT REQUIREMENT ASSET DESCRIPTION
------------------------------------------------------------ ------------------------------------------------- ---------------------
Required for Guad (Rectifier) 6.1 K wpw SVG 8800 PR Coat/Develop Track $200,000
Required for Guad (Rectifier) 6.1 K wpw SVG 8800 PR Coat/Develop Track $200,000
Required for Guad (Rectifier) 6.1 K wpw SVG 8800 PR Coat/Develop Track $200,000
Required forPiestany (M. Gate) 4K wpw DAINIPPON SCREEN SCW636CV $200,000
Required for Tesla (Std. Lin.) 11 K wpw REGEN SVG8632 CTD SYSTEM/862 $200,000
Required for Tesla (Std. Lin.) 11 K wpw Plasma Etcher $225,000
Required for Piestany (M. Gate) 4K wpw HP 4062UX TEST SYSTEM $300,000
Required for CDMC 1500 wpw AMT 5000 ox/nit etcher (2 chamber) $350,000
Aizu MOS7X - 2000 wpw Ph I Auto BHF Wet Glass Etch $440,000
Aizu MOS7X - 2000 wpw Ph I Auto BHF Wet Glass Etch $440,000
Aizu MOS7X - 2000 wpw Ph I Auto SPM PIRANHA CLEAN $440,000
Aizu MOS7X - 2000 wpw Ph I Semitool SAT DI Water Rinse $440,000
Aizu MOS7X - 2000 wpw Ph I Semitool SAT Oxide Removal $440,000
Aizu MOS7X - 2000 wpw Ph I Semitool SAT PSG Removal $440,000
Aizu MOS7X - 2000 wpw Ph I Semitool SAT Veil Remove Ox Etch $440,000
Aizu MOS7X - 2000 wpw Ph I P5000 Poly Etcher $450,000
Required for Guad (Rectifier) 6.1K wpw CHA M50 Aluminum Evaporator $450,000
Required for CDMC 1500 wpw Spec hood (9 tanks) $500,000
Required for Guad (Rectifier) 6.1K wpw DISCO GRINDER $650,000
Required for Tesla (Std. Lin.) 11 K wpw DISCO #650 GRINDER-DFG-73H/ $650,000
Aizu MOS7X - 2000 wpw Ph I SVG VTR Furnace: Vertical(Low Temp Anneal $750,000
Aizu MOS7X - 2000 wpw Ph I SVG VTR LP-Nitride $800,000
Aizu MOS7X - 2000 wpw Ph I SVG VTR LP-Nitride $800,000
Aizu MOS7X - 2000 wpw Ph I SVG VTR LP-Poly $800,000
Required for Guad (Rectifier) 6.1K wpw Balzers LLS801 Sputtering Tool $900,000
Required for Guad (Rectifier) 6.1K wpw Balzers LLS801 Sputtering Tool $900,000
Required for CDMC 1500 wpw I-Line Stepper $1,000,000
Required for CDMC 1500 wpw I-Line Stepper $1,000,000
TOTAL $18,380,000
$18,380,000
TOTALS
CAPX GAP 1999-2000 UPDATED: 4/20/99
COST TO
PROCURE TOOL
NOW
SCG PROJECT REQUIREMENT ASSET DESCRIPTION
----------------------------------------------------------------- ----------------------------------------------- ------------------
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Nikon G4-G7 with EFA q-Une $300,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Prober forIinking $40,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Prober for Inking $40,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Prober for Inking $40,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Parametric prober $40,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Prober for FET Tester $40,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Prober for FET Tester $40,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Prober for FET Tester $40,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Prober for FET Tester $40,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Prober for FET Tester $40,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Prober for FET Tester $40,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Prober for MST Tester $40,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Prober for MST Tester $40,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Prober for TMT Tester $40,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Prober for TMT Tester $40,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Xxxxx (Barrel) $50,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Xxxxx (Barrel) $50,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Xxxxx (Barrel) S50,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Xxxxx (Barrel) $50,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Xxxxx (Barrel) $50,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Xxxxx (Barrel) $50,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Xxxxx (Barrel) $50,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Xxxxx (Barrel) $50,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Xxxxx (Barrel) $50,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Xxxxx (Barrel) $50,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Fusion 200 / 150 Resist Cure $100,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Parametric Tester $105,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II FET Tester for IGBT $150,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II FET Tester for IGBT $150,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Laser Trim, For ACMOS $150,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II TEGAL901 $175,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II TEGAL901 $175,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II TEGAL901 $175,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II X0XX0 Xxxx Hood/SEZ 101 Wet Nitride Etch $190,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II SVG 8600/8800 Coat Standalone Track $200,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II SVG 8600/8800 Coat Standalone Track $200,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II SVG 8600/6800 Coat Standalone Track $200,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II SVG 8600/8800 Coat Standalone Track $200,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II SVG 8600/8800 Coat Standalone Track $200,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II SVG 8600/8800 Coat Standalone Track $200,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II SVG 8600/8800 Deve Standalone TraCK $200,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II SVG 8600/8800 Deve Standalone Track $200,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II SVG 8600/8800 Deve Standalone, Track $200,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II SVG 8600/8800 Deve Standalone Track $200,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II SVG 8600/8800 Deve Standalone Track $200,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II SVG 8600/8800 Deve Standalone Track $200,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II SVG 8600/8800 Deve Standalone Track $200,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II SVG 8600/8800 Deve Standalone Track $200,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II TEGAL903 $225,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II TEGAL903 $225,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II TEGAL903 $225,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II TEGAL903 $225,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II DNS SPW-612A Wet Metal Etch $300,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II FSI Mercury Pre-CVD/Metal Clean $400,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II FSI Mercury Pre-Diffusion Clean $400,000
CAPX GAP 1999-2000 UPDATED: 4/20/99
COST TO
PROCURE TOOL
NOW
SCG PROJECT REQUIREMENT ASSET DESCRIPTION
----------------------------------------------------------------- ----------------------------------------------- ------------------
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II FSI Mercury Pre-Diffusion Clean $400,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II FSI Mercury Pre-Diffusion Clean $400,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Auto BHF BATH /Semitool SAT Wet Oxide Etch $440,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Auto BHF BATH /Semitool SAT Wet Oxide Etch $440,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Auto BHF BATH /Semitool SAT Wet Oxide Etch $440,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Auto SPM Bath /Semi~tool SAT PIRANHA CLEAN $440,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Semitool SAT Oxide Removal $440,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Semitool SAT Oxide Removal $440,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Semitool SAT PSG Removal $440,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Semftool SAT Veil Remove Ox Etch $440,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II XXX Xxxx 50 Back Metal Evap $450,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II XXX Xxxx 50 Back Metal Evap $450,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II MRL Cyclone/ Semy Controllers Fumace $450,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II MRL Cyclone/ Semy Controllers Fumace $450,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II MST Tester for VHVIC $450,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II MST Tester for VHVIC $450,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II P5000 Poly Etcher $450,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Backgrinder $650,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II SVG VTR Furnace $750,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II SVG VTR Furnace :Vertical (Low Temp Anneal) $750,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Varian 3290 Thick Al-SI-Cu Sputter $750,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II SVG VTR LP-Nitride $800,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II SVG VTR LP-Nitride $800,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II SVG VTR LP-Poly $800,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II SVG VTR LP-Poly $800,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Nikon I-line 1-Line Coritical $1,000,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Applied Endura Barrier Metal/Thin Al-SI-Cu $1,250,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Xxxxx G SD High Current Implanter $2,500,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Xxxxx GSD High Current Implanter $2,500,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Xxxxx GSD High Current Implanter $2,500,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Xxxxx GSD Med Current Implanter $2,500,000
Aizu MOS7X (IGBT2Trench,VHVIC,ACMOS) 3000-5000 wpw Ph II Xxxxx GSD Med Current Implanter $2,500,000
----------------------------------------------- ------------------
TOTAL $35,850,000
NBV EQUIVALENT $17,925,000
