AMENDMENT NO. 2 TO AIRCRAFT LEASE

Exhibit 10.22

AMENDMENT NO. 2 TO AIRCRAFT LEASE

        This Amendment No. 2 to Lease Agreement (“Lease” or “Agreement”) is executed this 28th day of August, 2009 by and between EAGLE II, LLC, a Montana limited liability company (“Lessor”) and SEMITOOL, INC., a Montana corporation, with its principal place of business at 000 Xxxx Xxxxxxx Xxxxx, Xxxxxxxxx, Xxxxxxx (“Lessee”).

RECITALS

    A.        Lessor is the owner of a Falcon 50 (the “Aircraft”) with a serial number of 24 and a registration number of N929T.

    X.        Xxxxxx leased the Aircraft to the Lessee pursuant to the terms of a Lease Agreement dated March 31, 2004, as amended (the “Lease Agreement”).

    C.        Lessee and Lessor have agreed to reduce the rental amount for the Aircraft.

        NOW, THEREFORE, in consideration of the mutual promises and covenants exchanged herein and for other good and valuable consideration, the parties hereto agree as follows:

    1.        Amended Rental. Effective July 1, 2009, Lessee hereby covenants and agrees to pay Lessor, during the Term, a monthly rental of TEN THOUSAND DOLLARS ($10,000.00) per month.

    2.        Other Terms. All other terms of the Lease Agreement shall remain unchanged and shall be incorporated by reference herein in their entirety.

        IN WITNESS WHEREOF, the Lessee and Lessor have duly executed this Amendment No. 2 as of the date first written above.

LESSEE: SEMITOOL, INC.	LESSOR: EAGLE II, LLC
By:      /s/Xxxxx X. Xxxxx            ------------------------------------------------ Name:  Xxxxx X. Xxxxx            ------------------------------------------------ Title:    VP-Finance, CFO            ------------------------------------------------	By:      /s/Xxxxxx X. Xxxxxxxx            ------------------------------------------- Name:  Xxxxxx X. Xxxxxxxx            ------------------------------------------- Title:    President            -------------------------------------------