Exhibit 21.01
ATMI, INC.
SUBSIDIARIES
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Entity State or Jurisdiction of Incorporation or Organization
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Advanced Technology Materials, Inc. Delaware
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Epitronics Corporation Delaware
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ATMI Ecosys Corporation California
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Advanced Delivery & Chemical Systems Nevada, Inc. Nevada
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Advanced Delivery & Chemical Systems Holdings, LLC Delaware
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Advanced Delivery & Chemical Systems Operating, LLC Delaware
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Advanced Delivery & Chemical Systems Manager, Inc. Delaware
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ATMI Materials, Ltd. Texas
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ATMI Korea Co. Ltd. Korea
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ATMI UK Limited Scotland
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ATMI Fab Services, Inc. (fka ESCA, Inc.) New Mexico
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ATMI Fab Services Ireland (fkaESCA Ireland, Inc.) New Mexico
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MST Analytics, Inc. Delaware
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FPM Analytics, Inc. Illinois
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MST Measurement Systems, Inc. Illinois
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ATMI Packing Inc. (fka NOW Technologies, Inc.) Minnesota
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ATMI Packaging International Inc. (fka NOW Technologies Minnesota
International, Ltd.)
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NOW Japan Branch Japan
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ATMI International Holdings, Inc. Delaware
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ATMI Taiwan Holdings, Inc. Delaware
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ATMI Belgium Holdings, Inc. Delaware
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ATMI Belgium, LLC Delaware
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Emosyn LLC Delaware
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Hypernex, Inc. Delaware
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Newform, N.V. Belgium
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ATMI Japan Branch Japan
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ATMI Taiwan Co. Ltd. (fka ATMI Taiwan Branch) Taiwan
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ATMI GmbH Germany
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Advanced Technology Materials FSC, Inc. Barbados
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ATMI PTE LTD. Singapore
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