Common Contracts

Exhibit 2.1 AGREEMENT AND PLAN OF MERGER

Voting Agreement • July 15th, 2002 • Fei Co • Laboratory analytical instruments • Delaware

• Contract Type
  Voting Agreement
• Filed
  July 15th, 2002
• Company
  Fei Co
• Industry
  Laboratory analytical instruments
• Jurisdiction
  Delaware

RECITALS

Voting Agreement • November 12th, 1996 • Cooper & Chyan Technology Inc • Services-prepackaged software • Delaware

• Contract Type
  Voting Agreement
• Filed
  November 12th, 1996
• Company
  Cooper & Chyan Technology Inc
• Industry
  Services-prepackaged software
• Jurisdiction
  Delaware