1 EXIHIBIT 10.50 MORI(TM) SOURCE TECHNOLOGY LICENSE AGREEMENT This LICENSE AGREEMENT ("Agreement") is made and entered into as of March 18, 1998 (the "Effective Date") by and between Lam Research Corporation, a Delaware corporation ("Lam") and Trikon...Source Technology License Agreement • May 12th, 1998 • Lam Research Corp • Special industry machinery, nec • California
Contract Type FiledMay 12th, 1998 Company Industry Jurisdiction
EXHIBIT 10.28Source Technology License Agreement • April 8th, 1998 • Trikon Technologies Inc • Special industry machinery, nec • California
Contract Type FiledApril 8th, 1998 Company Industry Jurisdiction
EXHIBIT 10.27 -------------Source Technology License Agreement • November 14th, 1997 • Trikon Technologies Inc • Special industry machinery, nec • California
Contract Type FiledNovember 14th, 1997 Company Industry Jurisdiction