Project full title: "Single Nanometer Manufacturing for beyond CMOS devices" Grant agreement no: 318804Grant Agreement • November 15th, 2023
Contract Type FiledNovember 15th, 2023Participant no. Participant organisation name Part. short name Activity Type Country 1 (Co) Technische Universität Ilmenau TUIL HER Germany 2 EV Group E. Thallner GmbH EVG IND; End-‐user Austria 3 IMEC IMEC RES Belgium 4 Mikrosistemi Ltd µS SME; End-‐User Bulgaria 5 Universität Bayreuth UBT HER Germany 6 Technische Universiteit Delft TUD HER Netherlands 7 Spanish National Research Council CSIC RES Spain 8 IBM Research GmbH IBM IND; End-‐user Switzerland 9 École polytechnique fédérale de Lausanne EPFL HER Switzerland 10 SwissLitho AG SL SME; End-‐User Switzerland 11 Oxford Instruments Nanotechnology Tools Ltd OINT IND; End-‐user UK 12 Imperial College London IMPERIAL HER UK 13 The Open University OU HER UK 14 Oxford Scientific Consultants Ltd OSC SME UK 15 VSL Dutch Metrology Institute VSL IND Netherlands 15 University of Liverpool ULIV HER UK