Fourth Amendment EXHIBIT 10.28 FOURTH AMENDMENT TO SECOND AMENDED AND RESTATED LEASE AGREEMENT BY AND BETWEEN ET LLC, a Delaware limited liability company d/b/a ET QRS LLC as LANDLORD and ETEC SYSTEMS, INC. a Nevada corporation as TENANT Premises:...Lease Agreement • October 18th, 1999 • Etec Systems Inc • Special industry machinery, nec
4th Amendment EXHIBIT 10.24 EXECUTION VERSION FOURTH AMENDMENT TO CREDIT AGREEMENT THIS FOURTH AMENDMENT TO CREDIT AGREEMENT (this "Amendment"), dated as of September 30, 1999, is entered into by and among: (1) ETEC SYSTEMS, INC., a Nevada corporation...Credit Agreement • October 18th, 1999 • Etec Systems Inc • Special industry machinery, nec • California
Third Amendment EXHIBIT 10.27 THIRD AMENDMENT TO SECOND AMENDED AND RESTATED LEASE AGREEMENT THIS THIRD AMENDMENT TO SECOND AMENDED AND RESTATED LEASE AGREEMENT (the "Amendment"), dated as of February __, 1999 is entered into by and between ET LLC, a...Lease Agreement • October 18th, 1999 • Etec Systems Inc • Special industry machinery, nec
5th Amendment EXHIBIT 10.25 EXECUTION VERSION FIFTH AMENDMENT TO PARTICIPATION AGREEMENT THIS FIFTH AMENDMENT TO PARTICIPATION AGREEMENT (this "Amendment"), dated as of September 30, 1999, is entered into by and among: (a) ETEC SYSTEMS, INC., a Nevada...Participation Agreement • October 18th, 1999 • Etec Systems Inc • Special industry machinery, nec • California
