0000891618-03-002295 Sample Contracts

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August 13, 2002 VIA HAND DELIVERY Robert G. Ozarski 13894 Lake Poway Road San Diego California 92064 Re: Separation Agreement and General Release of All Claims Bob:
Separation Agreement and General Release of All Claims • May 5th, 2003 • Therma Wave Inc • Industrial instruments for measurement, display, and control

Pursuant to our discussion, I am handing you a document entitled “Separation Agreement and General Release of All Claims.” You have forty-five (45) days in which to decide whether to sign the document. Should you sign the agreement, you then have an additional seven days to revoke your approval of the documents. The release will not become final until after this seven-day revocation period has lapsed. You are reminded of your continued obligations under the Proprietary Information Agreement. A copy of this agreement is enclosed for your records. Because the proposed Separation Agreement affects your legal rights, we suggest that you consult with an attorney before signing it.

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