1 Exhibit 10.51 LOAN AGREEMENT dated as of March 30, 1998Participation Agreement • May 12th, 1998 • Lam Research Corp • Special industry machinery, nec • California
1 EXIHIBIT 10.50 MORI(TM) SOURCE TECHNOLOGY LICENSE AGREEMENT This LICENSE AGREEMENT ("Agreement") is made and entered into as of March 18, 1998 (the "Effective Date") by and between Lam Research Corporation, a Delaware corporation ("Lam") and Trikon...Source Technology License Agreement • May 12th, 1998 • Lam Research Corp • Special industry machinery, nec • California
