EXHIBIT 10.12A AMENDMENT TO LOAN DOCUMENTS BORROWER: SUBMICRON SYSTEMS, INC. ADDRESS: 6330 HEDGEWOOD DRIVE ALLENTOWN, PENNSYLVANIA 18106 BORROWER: SUBMICRON WET PROCESS STATIONS, INC. ADDRESS: 3381 EDWARDS AVENUE SANTA CLARA, CALIFORNIA 95054 DATE:...Loan Agreement • March 31st, 1999 • Submicron Systems Corp • Special industry machinery, nec
