R E C I T A L S: - - - - - - - -Option Agreement • October 3rd, 1996 • Plasma & Materials Technologies Inc • Special industry machinery, nec • California
Contract Type FiledOctober 3rd, 1996 Company Industry Jurisdiction
R E C I T A L S: - - - - - - - -Technology License Agreement • October 3rd, 1996 • Plasma & Materials Technologies Inc • Special industry machinery, nec • California
Contract Type FiledOctober 3rd, 1996 Company Industry Jurisdiction
EXHIBIT 10.15 THE SECURITIES EVIDENCED BY THIS WARRANT OR ISSUABLE UPON EXERCISE HEREOF HAVE BEEN ACQUIRED FOR INVESTMENT PURPOSES ONLY AND HAVE NOT BEEN REGISTERED UNDER THE SECURITIES ACT OF 1933 OR ANY STATE SECURITIES LAWS. SUCH SECURITIES MAY NOT...Warrant Agreement • October 3rd, 1996 • Plasma & Materials Technologies Inc • Special industry machinery, nec • California
Contract Type FiledOctober 3rd, 1996 Company Industry Jurisdiction
R&D AGREEMENTResearch and Development • October 3rd, 1996 • Plasma & Materials Technologies Inc • Special industry machinery, nec • California
Contract Type FiledOctober 3rd, 1996 Company Industry Jurisdiction
R E C I T A L S: - - - - - - - -Share Subscription and Shareholders Agreement • October 3rd, 1996 • Plasma & Materials Technologies Inc • Special industry machinery, nec • California
Contract Type FiledOctober 3rd, 1996 Company Industry Jurisdiction
R E C I T A L S: - - - - - - - -Partnership Subscription Agreement • October 3rd, 1996 • Plasma & Materials Technologies Inc • Special industry machinery, nec • California
Contract Type FiledOctober 3rd, 1996 Company Industry Jurisdiction