EXHIBIT 10.1 SUBORDINATION AGREEMENT BORROWER: TEGAL CORPORATION AND ITS SUBSIDIARIES SPUTTERED FILMS, INC., TEGAL GERMANY, TEGAL JAPAN, INC. AND TEGAL ITALY, SRL SUBORDINATING CREDITOR: SILICON VALLEY BANK DATE: JUNE 30, 2003 THIS SUBORDINATION...Subordination Agreement • August 15th, 2003 • Tegal Corp /De/ • Special industry machinery, nec • New York
Exhibit 10.2 June 30, 2003 Tegal Corporation 2201 South McDowell Blvd. Petaluma, CA 94954 Gentlemen: Reference is made to (i) the Loan and Security Agreement, and the Loan and Security Agreement (Exim Program), both between you ("Borrower") and us...Letter Agreement • August 15th, 2003 • Tegal Corp /De/ • Special industry machinery, nec
Reference is made to (i) the Loan and Security Agreement, and the Loan and Security Agreement (Exim Program), both between you ("Borrower") and us ("Silicon"), and both dated as of June 26, 2002 (as amended, restated, supplemented, or otherwise modified from time to time, collectively the "Loan Agreements"), and (ii) the Schedule to Loan and Security Agreement, and the Schedule to Loan and Security Agreement (Exim Program), both between Borrower and Silicon, and both dated as of June 26, 2002 (as amended, restated, supplemented or otherwise modified from time to time, collectively the "Loan Agreement Schedules"). This letter agreement (this "Agreement"), the Loan Agreements, the Loan Agreement Schedules, and all other written documents and agreements between us are referred to herein collectively as the "Loan Documents". Capitalized terms used, but not defined, in this Agreement shall have the meanings set forth in the Loan Agreements and the Loan Agreement Schedules.
