February 4, 2014 Mattson Technology, Inc. 47131 Bayside Parkway Fremont, CA 94538 Attn: Michael DodsonWaiver and Amendment Agreement • February 5th, 2014 • Mattson Technology Inc • Special industry machinery, nec • California
Re: Waiver and Amendment Agreement (this “Letter Agreement”) relating to that certain Credit Agreement, dated as of April 12, 2013, among Mattson Technology, Inc., a Delaware corporation (the “Borrower”), the Lenders named therein as parties thereto, and Silicon Valley Bank, a California corporation, in its capacity as administrative agent for such Lenders (in such capacity, the “Administrative Agent”) (as amended prior to the date hereof, the “Credit Agreement”, the terms defined therein and not otherwise defined herein being used herein as therein defined).
