EXHIBIT 10.1 MASTER REAFFIRMATION AND AMENDMENT NO. 3 TO LOAN DOCUMENTS THIS MASTER REAFFIRMATION AND AMENDMENT NO. 3 TO LOAN DOCUMENTS (this "Agreement") is made as of the 21st day of November, 2002, by and among ZYGO CORPORATION, a Delaware...Zygo Corp • February 10th, 2003 • Optical instruments & lenses • Connecticut
