Exhibit 2.2 SHAREHOLDERS AGREEMENT This Shareholders Agreement is made and entered into as of the 5th day of February, 1996 among FSI International, Inc., a Minnesota corporation ("FSI"), and the shareholders of Semiconductor Systems, Inc., a...Shareholders Agreement • March 6th, 1996 • Fsi International Inc • Special industry machinery, nec • Minnesota
Contract Type FiledMarch 6th, 1996 Company Industry Jurisdiction