Exhibit 2.1(b) SEMICONDUCTOR SYSTEMS, INC. EMPLOYMENT AGREEMENTIncentive Stock Option Agreement • March 21st, 1996 • Fsi International Inc • Special industry machinery, nec • Minnesota
Exhibit 2.1(a) Form of Affiliate Agreement --------------------------- February __, 1996 FSI International, Inc. 322 Lake Hazeltine Drive Chaska, MN 55318 Gentlemen: This letter is delivered to you in compliance with Section 5.18 of the Agreement and...Fsi International Inc • March 21st, 1996 • Special industry machinery, nec
