Exhibit 10.1 THERMA-WAVE, INC. DIRECTOR STOCK OPTION AGREEMENT (Nonqualified Stock Option) THIS DIRECTOR STOCK OPTION AGREEMENT (this "Agreement") is made and entered into as of _____________________, 20__ by and between Therma-Wave, Inc., a Delaware...Director Stock Option Agreement • February 4th, 2005 • Therma Wave Inc • Industrial instruments for measurement, display, and control • Delaware
