EXHIBIT 5.1 AGREEMENT AND PLAN OF MERGER BY AND BETWEEN BROOKS AUTOMATION, INC.Merger Agreement • July 24th, 2001 • Brooks Automation Inc • Special industry machinery, nec • Delaware
Contract Type FiledJuly 24th, 2001 Company Industry Jurisdiction
EXHIBIT 5.1 AGREEMENT AND PLAN OF MERGER BY AND BETWEEN BROOKS AUTOMATION, INC.Merger Agreement • July 24th, 2001 • Brooks Automation Inc • Special industry machinery, nec • Delaware
Contract Type FiledJuly 24th, 2001 Company Industry Jurisdiction