Exhibit 10.1 MKS INSTRUMENTS, INC. Restricted Stock Unit Agreement Granted Under the 2004 Stock Incentive Plan AGREEMENT made this 5th day of April 2006 (the "Grant Date"), between MKS Instruments, Inc., a Massachusetts corporation (the "Company"),...MKS Instruments Inc • May 10th, 2006 • Industrial instruments for measurement, display, and control • Massachusetts
Company FiledMay 10th, 2006 Industry Jurisdiction