Exhibit 10.1 MKS INSTRUMENTS, INC. Restricted Stock Unit Agreement Granted Under the 2004 Stock Incentive Plan AGREEMENT made this 5th day of April 2006 (the "Grant Date"), between MKS Instruments, Inc., a Massachusetts corporation (the "Company"),...Restricted Stock Unit Agreement • May 10th, 2006 • MKS Instruments Inc • Industrial instruments for measurement, display, and control • Massachusetts
