WARRANT TO PURCHASE SHARES OF COMMON STOCK OF TEGAL CORPORATION (A DELAWARE CORPORATION)Warrant Agreement • February 13th, 2002 • Tegal Corp /De/ • Special industry machinery, nec • California
EXHIBIT (i) FORM OF UNIT PURCHASE AGREEMENT Tegal Corporation 2201 South McDowell Boulevard Petaluma, CA 94954 Ladies & Gentlemen: The undersigned, _________________________________(the "Investor"), hereby confirms its agreement with you as follows:...Unit Purchase Agreement • February 13th, 2002 • Tegal Corp /De/ • Special industry machinery, nec • California
