------------------------------------------------------------------------------- - UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 ------------------------Annual Report • March 6th, 2002 • Tegal Corp /De/ • Special industry machinery, nec
Contract Type FiledMarch 6th, 2002 Company Industry
UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 ------------------------Quarterly Report • March 6th, 2002 • Tegal Corp /De/ • Special industry machinery, nec
Contract Type FiledMarch 6th, 2002 Company Industry