EXHIBIT 99.1 FIRST AMENDMENT TO RIGHTS AGREEMENT FIRST AMENDMENT, dated as of January 15, 1999 ("First Amendment"), to Rights Agreement dated as of June 11, 1996 (the "Rights Agreement"), between Tegal Corporation (the "Company"), and ChaseMellon...Rights Agreement • January 15th, 1999 • Tegal Corp /De/ • Special industry machinery, nec
