Exhibit (d)(6) SPEEDFAM-IPEC, INC. FORM OF INCENTIVE STOCK OPTION AGREEMENTIncentive Stock Option Agreement • January 3rd, 2002 • Speedfam Ipec Inc • Special industry machinery, nec
Exhibit (d)(5) SPEEDFAM-IPEC, INC. FORM OF NONSTATUTORY STOCK OPTION AGREEMENT Unless otherwise defined herein, the terms defined in the Plan shall have the same defined meanings in this Option Agreement. I. NOTICE OF STOCK OPTION GRANT (See Attached...Speedfam Ipec Inc • January 3rd, 2002 • Special industry machinery, nec • Illinois
