0001047469-07-008764 Sample Contracts

AXCELIS TECHNOLOGIES, INC. EXECUTIVE SEPARATION AGREEMENT
Executive Separation Agreement • November 8th, 2007 • Axcelis Technologies Inc • Special industry machinery, nec • Massachusetts

THIS EXECUTIVE SEPARATION AGREEMENT, dated as of August 22, 2007, is made by and between Axcelis Technologies, Inc. (hereinafter referred to as the "Company") and Marc S. Levine (hereinafter referred to as "Executive"). In consideration of the mutual covenants contained herein, the parties agree as follows:

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AMENDED AND RESTATED EMPLOYMENT AGREEMENT
Employment Agreement • November 8th, 2007 • Axcelis Technologies Inc • Special industry machinery, nec • Massachusetts

The parties to this Amended and Restated Employment Agreement are AXCELIS TECHNOLOGIES, INC., a Delaware corporation (the "Company"), and MARY G. PUMA, an individual residing in the Commonwealth of Massachusetts (the "Executive"). The Company and the Executive are party to an Employment Agreement dated June 30, 2000 ("Original Agreement"). The parties desire to amend and restate the Original Agreement. This Amended and Restated Employment Agreement provides for the continued employment of the Executive upon the terms and conditions of set forth herein. The execution and delivery of this Agreement have been duly authorized by the Board of Directors of the Company (the "Board"). This Agreement shall become effective on November 6, 2007 (the "Effective Date").

CHANGE OF CONTROL AGREEMENT
Change of Control Agreement • November 8th, 2007 • Axcelis Technologies Inc • Special industry machinery, nec • Massachusetts

AGREEMENT by and between AXCELIS TECHNOLOGIES, INC., a Delaware corporation (the "Company"), and (the "Executive"), dated as of the day of , 2007.

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