0001047469-12-001874 Sample Contracts

FIRST LOAN MODIFICATION AGREEMENT
First Loan Modification Agreement • February 29th, 2012 • Axcelis Technologies Inc • Special industry machinery, nec

This First Loan Modification Agreement (this “Loan Modification Agreement”) is entered into as of December 27, 2011, by and among (a) SILICON VALLEY BANK, a California corporation, with its principal place of business at 3003 Tasman Drive, Santa Clara, California 95054 and with a loan production office located at 275 Grove Street, Suite 2-200, Newton, Massachusetts 02466 (“Bank”), and (b) AXCELIS TECHNOLOGIES, INC., a Delaware corporation (“ATI”) and AXCELIS TECHNOLOGIES CCS CORPORATION, a Delaware corporation (“ATCC”), each with offices located at 108 Cherry Hill Drive, Beverly, Massachusetts 01915 (ATI and ATCC are referred to herein, individually and collectively, jointly and severally, as “Borrower”).

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FORM OF [AMENDED AND RESTATED](1) INDEMNIFICATION AGREEMENT
Indemnification Agreement • February 29th, 2012 • Axcelis Technologies Inc • Special industry machinery, nec • Delaware

This [Amended and Restated] Indemnification Agreement, effective as of the day of , 20 , by and between Axcelis Technologies, Inc., a Delaware corporation (the “Company”), and , the {Title} of the Company (“Indemnitee”) [amends and restates the Indemnification Agreement dated as of , 20 by and between the Company and Indemnitee, as previously amended];

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