0001047469-15-001994 Sample Contracts

AXCELIS TECHNOLOGIES, INC. EXECUTIVE SEPARATION PAY AGREEMENT
Executive Separation Pay Agreement • March 11th, 2015 • Axcelis Technologies Inc • Special industry machinery, nec • Massachusetts

THIS EXECUTIVE SEPARATION PAY AGREEMENT, dated as of , 2015, is made by and between Axcelis Technologies, Inc. (the “Company”) and (the “Executive”).

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LEASE AGREEMENT made as of the 30th day of January, 2015 by and between BEVERLY PROPERTY OWNER LLC as Landlord, and AXCELIS TECHNOLOGIES, INC. as Tenant
Lease Agreement • March 11th, 2015 • Axcelis Technologies Inc • Special industry machinery, nec

THIS LEASE AGREEMENT (this “Lease”) made as of the 30th day of January, 2015, by and between BEVERLY PROPERTY OWNER LLC, a Delaware limited liability company, as landlord, having an office at c/o Middleton Partners, 400 Skokie Boulevard, Northbrook, Illinois 60062, and AXCELIS TECHNOLOGIES, INC., a Delaware corporation, having an office at 108 Cherry Hill Drive, Beverly, Massachusetts 01915.

SECOND AMENDMENT TO LOAN AND SECURITY AGREEMENT
Loan and Security Agreement • March 11th, 2015 • Axcelis Technologies Inc • Special industry machinery, nec

This Second Amendment to Loan and Security Agreement (this “Amendment”) is entered into as of February 2, 2015, by and between SILICON VALLEY BANK, a California corporation, with its principal place of business at 3003 Tasman Drive, Santa Clara, California 95054 and with a loan production office located at 275 Grove Street, Suite 2-200, Newton, Massachusetts 02466 (“Bank”), and AXCELIS TECHNOLOGIES, INC., a Delaware corporation with offices located at 108 Cherry Hill Drive, Beverly, Massachusetts 01915 (“Borrower”).

SIXTH AMENDMENT TO REAL ESTATE SALE AGREEMENT
Real Estate Sale Agreement • March 11th, 2015 • Axcelis Technologies Inc • Special industry machinery, nec

THIS SIXTH AMENDMENT TO REAL ESTATE SALE AGREEMENT (“Amendment”) is made effective as of January 30, 2015 by and between Middleton Beverly Investors LLC, a Delaware limited liability company, together with its successors and assigns (“Purchaser”) and Axcelis Technologies, Inc. (“Seller”).

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