0001104659-05-037663 Sample Contracts

CHANGE OF CONTROL AGREEMENT
Change of Control Agreement • August 9th, 2005 • Axcelis Technologies Inc • Special industry machinery, nec • Massachusetts

AGREEMENT by and between AXCELIS TECHNOLOGIES, INC., a Delaware corporation (the “Company”), and (the “Executive”), dated as of the day of , 200 .

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AXCELIS TECHNOLOGIES, INC. EXECUTIVE SEPARATION AGREEMENT
Executive Separation Agreement • August 9th, 2005 • Axcelis Technologies Inc • Special industry machinery, nec • Massachusetts

THIS EXECUTIVE SEPARATION AGREEMENT, dated as of July1, 2005, is made by and between Axcelis Technologies, Inc. (hereinafter referred to as the “Company”) and David W. Duff (hereinafter referred to as “Executive”). In consideration of the mutual covenants contained herein, the parties agree as follows:

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