0001104659-06-031215 Sample Contracts

REGISTRATION RIGHTS AGREEMENT by and between AXCELIS TECHNOLOGIES, INC., as Issuer, and QUANTUM PARTNERS LDC, as Purchaser Dated as of May 2, 2006
Registration Rights Agreement • May 4th, 2006 • Axcelis Technologies Inc • Special industry machinery, nec • New York

REGISTRATION RIGHTS AGREEMENT dated as of May 2, 2006 by and between Axcelis Technologies, Inc., a Delaware corporation (the “Company”), and Quantum Partners LDC, a Cayman Islands limited duration company (the “Purchaser”), pursuant to the Exchange and Purchase Agreement dated May 2, 2006 (the “Purchase Agreement”), between the Company and the Purchaser. In order to induce the Purchaser to enter into the Purchase Agreement, the Company has agreed to provide the registration rights set forth in this Agreement. The execution of this Agreement is a condition to the closing under the Purchase Agreement.

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