0001104659-07-062463 Sample Contracts

FORM OF INCENTIVE STOCK OPTION AGREEMENT IBIS TECHNOLOGY CORPORATION
Incentive Stock Option Agreement • August 14th, 2007 • Ibis Technology Corp • Semiconductors & related devices • Massachusetts

AGREEMENT made as of the th day of 20 , between Ibis Technology Corporation (the “Company”), a Massachusetts corporation having a principal place of business in Danvers, Massachusetts, and of , , an employee of the Company (the “Employee”).

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FORM OF DIRECTOR STOCK OPTION AGREEMENT IBIS TECHNOLOGY CORPORATION
Director Stock Option Agreement • August 14th, 2007 • Ibis Technology Corp • Semiconductors & related devices • Massachusetts

AGREEMENT made as of the th day of 20 , between Ibis Technology Corporation (the “Company”), a Massachusetts corporation, and , a director of the Company (the “Participant”).

AGREEMENT
Agreement • August 14th, 2007 • Ibis Technology Corp • Semiconductors & related devices • Massachusetts

This Agreement is entered into as of the th day of August, 2007 by and between Ibis Technology Corporation, a Massachusetts corporation (the “Company”) and Charles M. McKenna (the “Executive”).

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