SHARE PURCHASE AGREEMENT by and among SUMITOMO HEAVY INDUSTRIES, LTD., AXCELIS TECHNOLOGIES, INC. and SEN CORPORATION, AN SHI AND AXCELIS COMPANY Dated as of February 26, 2009Share Purchase Agreement • February 27th, 2009 • Axcelis Technologies Inc • Special industry machinery, nec • New York
Contract Type FiledFebruary 27th, 2009 Company Industry JurisdictionThis SHARE PURCHASE AGREEMENT (this “Agreement”) is made as of the 26th day of February, 2009, by and among SUMITOMO HEAVY INDUSTRIES, LTD., a company organized as a kabushiki kaisha under the laws of Japan (“Purchaser”), Axcelis Technologies, Inc., a corporation incorporated under the laws of Delaware (“Seller”), and SEN CORPORATION, AN SHI AND AXCELIS COMPANY, a company organized as a kabushiki kaisha under the laws of Japan (the “Company”). Certain capitalized terms used in this Agreement are defined in Article IX.