0001104659-12-012381 Sample Contracts

AXCELIS TECHNOLOGIES, INC. EXECUTIVE SEPARATION AGREEMENT
Executive Separation Agreement • February 24th, 2012 • Axcelis Technologies Inc • Special industry machinery, nec • Massachusetts

THIS EXECUTIVE SEPARATION AGREEMENT, dated as of February 10, 2012, is made by and between Axcelis Technologies, Inc. (hereinafter referred to as the “Company”) and Matthew P. Flynn (hereinafter referred to as “Executive”). In consideration of the mutual covenants contained herein, the parties agree as follows:

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