0001104659-14-077729 Sample Contracts

Northern Bank & Trust Company letterhead] August 18, 2014
Business Loan Agreement • November 6th, 2014 • Axcelis Technologies Inc • Special industry machinery, nec • Massachusetts

Re: Amendment of the Business Loan Agreement, dated as of July 5, 2013, between Axcelis Technologies, Inc., a Delaware corporation (the “Borrower”), and Northern Bank & Trust, a Massachusetts corporation (the “Lender”).

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REAL ESTATE SALE AGREEMENT by and between AXCELIS TECHNOLOGIES, INC., as the Seller and MIDDLETON BEVERLY INVESTORS LLC, as the Purchaser October 3, 2014
Real Estate Sale Agreement • November 6th, 2014 • Axcelis Technologies Inc • Special industry machinery, nec • Massachusetts

THIS LEASE AGREEMENT (this “Lease”) made as of the day of [ ] , 2014, by and between [ ], a Delaware limited liability company, as landlord, having an office at c/o Middleton Partners, 400 Skokie Boulevard, Northbrook, Illinois 60062, and AXCELIS TECHNOLOGIES, INC., a Delaware corporation, having an office at 108 Cherry Hill Drive, Beverly, Massachusetts 01915.

WAIVER AND FIRST AMENDMENT TO LOAN AND SECURITY AGREEMENT
Loan and Security Agreement • November 6th, 2014 • Axcelis Technologies Inc • Special industry machinery, nec

This Waiver and First Amendment to Loan and Security Agreement (this “Amendment”) is entered into as of August 1, 2014, by and between SILICON VALLEY BANK, a California corporation, with its principal place of business at 3003 Tasman Drive, Santa Clara, California 95054 and with a loan production office located at 275 Grove Street, Suite 2-200, Newton, Massachusetts 02466 (“Bank”), and AXCELIS TECHNOLOGIES, INC., a Delaware corporation with offices located at 108 Cherry Hill Drive, Beverly, Massachusetts 01915 (“Borrower”).

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