Exhibit 4.5 Void after June 30, 2011 Warrant No. ________ [____________] to acquire [_________] share THIS WARRANT AND ANY SHARES ACQUIRED UPON THE EXERCISE OF THIS WARRANT HAVE NOT BEEN REGISTERED UNDER THE SECURITIES ACT OF 1933. THIS WARRANT AND...Warrant Agreement • July 2nd, 2003 • Tegal Corp /De/ • Special industry machinery, nec
SECURITY AGREEMENT SECURITY AGREEMENT (this "Agreement") dated _______, 2003, made by TEGAL CORPORATION, a Delaware corporation, and the other Grantors listed on the signature pages hereto, each with its principal offices as set forth on the signature...Security Agreement • July 2nd, 2003 • Tegal Corp /De/ • Special industry machinery, nec • New York
REGISTRATION RIGHTS AGREEMENT This REGISTRATION RIGHTS AGREEMENT (this "AGREEMENT") is made as of _______, 2003 by and among Tegal Corporation, a Delaware corporation (the "COMPANY") and (ii) the investors listed on EXHIBIT A hereto (collectively the...Registration Rights Agreement • July 2nd, 2003 • Tegal Corp /De/ • Special industry machinery, nec • New York
UNIT SUBSCRIPTION AGREEMENT CONVERTIBLE DEBENTURES AND WARRANTSUnit Subscription Agreement • July 2nd, 2003 • Tegal Corp /De/ • Special industry machinery, nec • New York
