0001193125-09-167301 Sample Contracts

NANOMETRICS INCORPORATED
Stock Option Agreement • August 6th, 2009 • Nanometrics Inc • Measuring & controlling devices, nec • California

Unless otherwise defined herein, the terms defined in the Nanometrics Incorporated 2000 Employee Stock Option Plan (the “Plan”) shall have the same defined meanings in this Stock Option Agreement – Non-U.S. Employees (the “Option Agreement”).

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NANOMETRICS INCORPORATED
Stock Option Agreement • August 6th, 2009 • Nanometrics Inc • Measuring & controlling devices, nec • California

Unless otherwise defined herein, the terms defined in the Nanometrics Incorporated 2000 Employee Stock Option Plan (the “Plan”) shall have the same defined meanings in this Stock Option Agreement (this “Option Agreement”).

NANOMETRICS INCORPORATED
Stock Option Agreement • August 6th, 2009 • Nanometrics Inc • Measuring & controlling devices, nec • California

Unless otherwise defined herein, the terms defined in the 2005 Equity Incentive Plan (the “Plan”) will have the same defined meanings in this Notice of Grant of Stock Option (the “Notice of Grant”) and Terms and Conditions of Stock Option Grant, attached hereto as Exhibit A (together, the “Option Agreement”).

NANOMETRICS INCORPORATED
Stock Option Agreement • August 6th, 2009 • Nanometrics Inc • Measuring & controlling devices, nec • California

Unless otherwise defined herein, the terms defined in the Nanometrics Incorporated 2002 Nonstatutory Stock Option Plan (the “Plan”) shall have the same defined meanings in this Stock Option Agreement (this “Option Agreement”).

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