andRights Agreement • July 30th, 1997 • Micrion Corp /Ma/ • Special industry machinery, nec • Massachusetts
RECITALSRights Agreement • December 4th, 1998 • Micrion Corp /Ma/ • Special industry machinery, nec • Massachusetts
1 EXHIBIT 2.1 AGREEMENT AND PLAN OF MERGERMerger Agreement • December 9th, 1998 • Micrion Corp /Ma/ • Special industry machinery, nec • Oregon
INVENTORY, ACCOUNTS RECEIVABLE AND INTANGIBLES SECURITY AGREEMENTSecurity Agreement • September 26th, 1997 • Micrion Corp /Ma/ • Special industry machinery, nec • Massachusetts
1 Exhibit 10.35 SUPPLEMENTARY SECURITY AGREEMENT SECURITY INTEREST IN GOODS AND CHATTELSSupplementary Security Agreement • September 26th, 1997 • Micrion Corp /Ma/ • Special industry machinery, nec
2 - 3 payable at the times and at the rate provided for in the Term Note. Overdue principal of the Term Loan and, to the extent permitted by law, overdue interest shall bear interest at a fluctuating rate per annum which at all times shall be equal to...Loan Agreement • September 26th, 1997 • Micrion Corp /Ma/ • Special industry machinery, nec • Massachusetts
COMMONWEALTH OF MASSACHUSETTS ) ) SS. COUNTY OF ESSEX )Security Agreement (Patents) • September 26th, 1997 • Micrion Corp /Ma/ • Special industry machinery, nec
1 Exhibit 10.37 SECURITY AGREEMENT (TRADEMARKS) WHEREAS, MICRION CORPORATION, a Massachusetts corporation, with a principal place of business at One Corporation Way, Peabody, MA 01960 (the "Company") and FLEET NATIONAL BANK, with a place of business...Security Agreement • September 26th, 1997 • Micrion Corp /Ma/ • Special industry machinery, nec
EXHIBIT BStock Option Agreement • December 9th, 1998 • Micrion Corp /Ma/ • Special industry machinery, nec • Oregon
