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EXHIBIT 4
JOINT FILING AGREEMENT
In accordance with Rule 13d-1(f)(1) promulgated under the Securities
Exchange Act of 1934, as amended, the undersigned hereby agree to the joint
filing with all other reporting persons on behalf of each of them of a statement
on Schedule 13D (including amendments thereto) with respect to the Common Stock,
par value $.0001 per share, of SubMicron Systems Corporation, a Delaware
corporation, and that this Agreement may be included as an Exhibit to such joint
filing.
IN WITNESS WHEREOF, the undersigned hereby execute this Agreement as of
December 5, 1997.
THE KB MEZZANINE FUND II, L.P.
By: EIP Capital Partners, L.P.
Its: General Partner
By: Equinox Investment Partners, L.L.C.
/s/ Xxxxxxx X. Xxxxxxx
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By: Xxxxxxx X. Xxxxxxx
Its: Managing Member
CELERITY SILICON, L.L.C.
/s/ Xxxx X. Xxxxxx
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By: Xxxx X. Xxxxxx
Its: Managing Member
Ex. 4-1