1 EXHIBIT 3 STOCKHOLDERS AGREEMENT STOCKHOLDERS AGREEMENT dated as of November 26, 1997, among SubMicron Systems Corporation, a Delaware corporation (the "Company"), The KB Mezzanine Fund II, L.P., a Delaware limited partnership ("KB"), Celerity...Stockholders Agreement • December 8th, 1997 • Kb Mezzanine Fund Ii Lp • Special industry machinery, nec • Delaware
Contract Type FiledDecember 8th, 1997 Company Industry Jurisdiction
JOINT FILING AGREEMENTJoint Filing Agreement • February 8th, 1999 • Kb Mezzanine Fund Ii Lp • Special industry machinery, nec
Contract Type FiledFebruary 8th, 1999 Company Industry
JOINT FILING AGREEMENTJoint Filing Agreement • January 7th, 1998 • Kb Mezzanine Fund Ii Lp • Special industry machinery, nec
Contract Type FiledJanuary 7th, 1998 Company Industry
1 EXHIBIT 1 THE SECURITIES SUBSCRIBED FOR UNDER THIS AGREEMENT HAVE NOT BEEN REGISTERED UNDER THE SECURITIES ACT OF 1933 (THE "SECURITIES ACT") OR ANY STATE SECURITIES LAW AND THE TRANSFER OF SUCH SECURITIES BY THE SUBSCRIBER IS RESTRICTED BY THE...Kb Mezzanine Fund Ii Lp • February 8th, 1999 • Special industry machinery, nec • Delaware
Company FiledFebruary 8th, 1999 Industry Jurisdiction
JOINT FILING AGREEMENTJoint Filing Agreement • December 8th, 1997 • Kb Mezzanine Fund Ii Lp • Special industry machinery, nec
Contract Type FiledDecember 8th, 1997 Company Industry