1 EXHIBIT 2.1 AGREEMENT AND PLAN OF MERGERMerger Agreement • December 9th, 1998 • Micrion Corp /Ma/ • Special industry machinery, nec • Oregon
Contract Type FiledDecember 9th, 1998 Company Industry Jurisdiction
EXHIBIT BStock Option Agreement • December 9th, 1998 • Micrion Corp /Ma/ • Special industry machinery, nec • Oregon
Contract Type FiledDecember 9th, 1998 Company Industry Jurisdiction