1 EXHIBIT 2.1 AGREEMENT AND PLAN OF MERGERAgreement and Plan of Merger • December 9th, 1998 • Micrion Corp /Ma/ • Special industry machinery, nec • Oregon
Contract Type FiledDecember 9th, 1998 Company Industry Jurisdiction
EXHIBIT BOption Agreement • December 9th, 1998 • Micrion Corp /Ma/ • Special industry machinery, nec • Oregon
Contract Type FiledDecember 9th, 1998 Company Industry Jurisdiction