Exhibit 10.11 EXECUTIVE CHANGE OF CONTROL AGREEMENT THIS EXECUTIVE CHANGE OF CONTROL AGREEMENT is dated as of ________, 2002 (this "Agreement"), by and between Mattson Technology, Inc., (the "Company"), and ____________ (the "Executive"). RECITALS...Executive Change of Control Agreement • August 14th, 2002 • Mattson Technology Inc • Special industry machinery, nec • California
