Exhibit 5 STOCK OPTION AGREEMENTExhibit 5 Stock Option Agreement • December 7th, 1998 • Software Investments LTD • Services-prepackaged software • Illinois
Contract Type FiledDecember 7th, 1998 Company Industry Jurisdiction
RECITALSExhibit 5 Stock Option Agreement • July 6th, 2000 • Mattson Technology Inc • Special industry machinery, nec • Delaware
Contract Type FiledJuly 6th, 2000 Company Industry Jurisdiction