FIFTH MODIFICATION AGREEMENT OF LOAN AGREEMENT BETWEEN INTEGRATED PROCESS EQUIPMENT CORP., IPEC CLEAN, INC. IPEC PRECISION, INC. IPEC PLANAR, INC., FORMERLY KNOWN AS IPEC PLANAR PHOENIX, INC., SUCCESSOR BY MERGER TO IPEC PLANAR PORTLAND, INC., AND...Fifth Modification Agreement of Loan Agreement • September 3rd, 1997 • Integrated Process Equipment Corp • Special industry machinery, nec
