EXHIBIT 10.1 LINE OF CREDIT INSTRUMENT LEASE AGREEMENT, CONSTRUCTION DEED OF TRUST WITH ASSIGNMENT OF RENTS, SECURITY AGREEMENT AND FIXTURE FILING THIS LEASE AGREEMENT, CONSTRUCTION DEED OF TRUST WITH ASSIGNMENT OF RENTS, SECURITY AGREEMENT AND...Lease Agreement, Construction Deed of Trust, Security Agreement • March 16th, 1998 • Etec Systems Inc • Semiconductors & related devices • California
