EXHIBIT 10.51 LICENSE REFERENCE NUMBER L004001 PATENT LICENSE AGREEMENT ("Agreement") dated December 15, 2000 ("Effective Date") between INTERNATIONAL BUSINESS MACHINES CORPORATION, a New York corporation ("IBM"), and IBIS TECHNOLOGY CORPORATION, a...License Reference Number L004001 • March 21st, 2001 • Ibis Technology Corp • Semiconductors & related devices • New York
