PATENT SUBLICENSE AGREEMENTPatent Sublicense • March 11th, 2004 • Cymer Inc • Special industry machinery, nec • Massachusetts
Contract Type FiledMarch 11th, 2004 Company Industry JurisdictionTHIS PATENT SUBLICENSE AGREEMENT (“Sublicense Agreement”), made as of this 7 day of Nov., 2003 (the “Effective Date”), by and between SRL-EUV, LLC, a Massachusetts limited liability company with principal offices at 15 Ward Street, Somerville, Massachusetts 02143 (“EUV”) and CYMER, INC., a Nevada corporation, with principal offices at 17075 Thornmint Court, San Diego California 92127 (“Cymer”).