Suspended Xxxxxxxxx junction arrays Sample Clauses

Suspended Xxxxxxxxx junction arrays. A circuit element can be considered as a superinductor if it displays a very large inductance and a minimal capacitive component. So far, efforts focused mainly on boosting the former by replacing conventional superconducting wires by Xxxxxxxxx junction arrays or disordered superconducting stripes. Little was done to minimize stray capacitances. However, most of the superconducting quantum devices are fabricated on silicon or sapphire, and present a high dielectric constant. With SiUCs we will develop a new technology: Xxxxxxxxx junction arrays patterned on very thin (~200nm) suspended silicon membranes. The electric field both above and below the device will then be mainly in vacuum. This configuration will therefore reduce the effective dielectric constant seen by the array down to one, while it is approximately six otherwise (this number comes from the widely used approximation in microwave engineering: εtotal = 1/ 2(ε top + εbottom )= 1/ 2(1+10) » 6), reducing the stray capacitance by the same amount. To obtain such suspended arrays, we will fabricate them by standard methods but using Silicon-On-Insulator substrates. Then the insulator (silicon oxide) will be etched away using hydrofluoric acid vapour. This technique was successfully employed to fabricate electromechanical systems compatible with qubits [Keller2017]. The same technique can also be used to reduce the parasitic capacitance of granular aluminium superinductors.
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