Gas Cabinet, Chemical Dispense Modules & VMB General Sign-off Criteria Sample Clauses

Gas Cabinet, Chemical Dispense Modules & VMB General Sign-off Criteria. All chemical delivery systems must undergo equipment sign-off process prior to start-up of equipment. All appropriate utility disciplines shall participate in this process to include chemical management department, if applicable. The format for the sign-off shall be the same as in section 5.1 titled “Manufacturing Equipment/Tool Installation Sign-off Procedure” of this document. Document Number: 12MAZ00153B Issue: H
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