Scanner Table Musterklauseln

Scanner Table. ∼ × × The scanner system is attached by an intermediate plate to the sample approach mechanism. The scanner system contains a 3-axis piezoelectric scanner. The max- imum scanning range is 100 μm in the X- and Y-axes, but typical scan sizes are much smaller (2 2 μm to 20 20 μm). The maximum extension in the Z-axis is 10 μm. The lateral resolution in closed-loop using the feedback signal from the capacitive displacement sensors is 3 nm. The Z-axis position is measured by a strain gauge, and features of 0.1 nm height can be resolved. The scanner head with the array of 16 tips is mounted on top of the scanner. The lateral distance between the tips (1.6 mm) is slightly larger than the thickness of the dust collector wheel (1.4 mm) to ensure that only a single tip can make contact with a sample at any time. ∼ The maximum height of a particle that can be fully characterised depends on the shape and dimensions of the tip. The presence of too large particles may cause image artefacts, i.e. the cantilever instead of the tip can touch the particle and disturb the image. The current tip/cantilever design puts this limit at 10 μm. Current dust models predict that the abundance of large particles decreases with particle radius – so large particles are rare. Using exposure times tailored to small particles means that the probability of a large particle within the scan field is low, and interference with the cantilevers is unlikely.